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This project aims to develop digital virtual tools that accurately model semiconductor processing using AI/ML and Physics based Models
Cornell University and Northeastern University
Funded by SEMI-ARL Flextech Program
AI in Semiconductor Cleanroom Project
AI in Semiconductor Cleanroom Project
Data Collection
Data Collection
Data collection approaches from CNF equipment such as lithography and etching tools.
Fabrication DOEs
Fabrication DOEs
A description of an effort and why it matters
DNNs
DNNs
A description of an effort and why it matters
Physics Aware AI
Physics Aware AI
A description of an effort and why it matters
Questions?
Questions?
Contact [email] to get more information on the project
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