Publications

Project Publications

Deep Learning for Predicting CD-SEMS of NEMS Device,
DOI: 10.1109/MEMS51670.2022.9699471

BinDev: a Metric of Geometric Accuracy for Plasma-etch 3D Modeling Using Computer Vision,
DOI: 10.1109/ASMC57536.2023.10121089

Double U-Net based Virtual Metrology on Plasma-Etch CD-SEM Images,
DOI: 10.1109/ASMC57536.2023.10121128

AI-Based Image Processing for Photoresist Latent Image Enhancement,
DOI: 10.1109/ASMC57536.2023.10121143